Effect by Temperature Distribution of Target Surface during Sputtering by Bipolar Pulsed Dc and Continuous Dc
نویسندگان
چکیده
منابع مشابه
High-rate low-temperature dc pulsed magnetron sputtering of photocatalytic TiO2films: the effect of repetition frequency
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The homoepitaxial growth of initially flat surfaces has so far always led to surfaces which become rougher and rougher as the number of layers increases: even in systems exhibiting ‘‘layer-by-layer’’ growth the registry of the layers is gradually lost. We propose that pulsed glancing-angle sputtering, once per monolayer, can in principle lead to layer-by-layer growth that continues indefinitely...
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ژورنال
عنوان ژورنال: Journal of the Korean Vacuum Society
سال: 2010
ISSN: 1225-8822
DOI: 10.5757/jkvs.2010.19.1.045